Single crystal pulling apparatus

Details Single crystal pulling apparatus Single crystal pulling apparatus

1996-12-26

1999-02-23

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117214, 117900, C30B 3500

Patent

active

058739386

ABSTRACT:
A single crystal pulling apparatus wherein a semiconductor melt is stored in an outer crucible, and a cylindrical inner crucible which acts as a partition body, is mounted inside the outer crucible to thus form a double crucible, and a single crystal of semiconductor is pulled from the semiconductor melt inside the inner crucible. The inner crucible contains a communicating portion, which is formed when the double crucible is formed, for allowing flow of the semiconductor melt into the inner crucible, and the communicating portion incorporates an arrangement for removal of gas bubbles which have adhered to the communicating portion.

REFERENCES:
patent: 5021118 (1991-06-01), Kawasaki
patent: 5474022 (1995-12-01), Abe et al.

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