Single crystal pulling apparatus

Details Single crystal pulling apparatus Single crystal pulling apparatus

1997-01-10

1999-02-16

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117200, 117214, C30B 3500

Patent

active

058715819

ABSTRACT:
A single crystal pulling apparatus comprising: a gas tight container, a double crucible for storing a semiconductor melt inside the gas tight container comprising an outer crucible and an inner crucible which are connected at a lower edge, and source material supply means for adding source material to the semiconductor melt at a position between the outer crucible and the inner crucible, characterized in that a flow restriction member is provided inside the semiconductor melt region between the outer crucible and the inner crucible for restricting the flow of the semiconductor melt.

REFERENCES:
patent: H520 (1988-09-01), Johnson et al.
patent: 5021225 (1991-06-01), Yamashita et al.
patent: 5314667 (1994-05-01), Lim et al.
patent: 5650008 (1997-07-01), Kou et al.

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