Single crystal pulling apparatus

Details Single crystal pulling apparatus Single crystal pulling apparatus

1996-06-05

1997-09-16

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117208, 117218, 117900, C30B 3500

Patent

active

056675887

ABSTRACT:
Arranged is a covering plate which closes and opens an entrance of a valve container between a lower chamber and an upper chamber, the lower chamber containing a crucible and the upper chamber containing a wire to pull a single crystal. The covering plate is contained in a circle-shaped space portion within a wall by closing and opening means. The covering plate closes the entrance so that an isolation valve is protected. Since at the time of opening the entrance the covering plate is contained within the wall without contacting with the wall, the fall of dusts produced by peeling off of a film deposited on the wall can be prevented. Furthermore, the covering plate is contained in a circle-shaped space portion without exposing the front and back surfaces thereof to the air.

REFERENCES:
patent: 5004519 (1991-04-01), Hariri
patent: 5096677 (1992-03-01), Katsuoka et al.
patent: 5254319 (1993-10-01), Oda et al.
IBM Technical Disclosure Bulletin Bochman et al. Jun. 1970.

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