Single crystal pulling apparatus

Details Single crystal pulling apparatus Single crystal pulling apparatus

1996-07-01

1998-04-07

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117208, 117900, C30B 3500

Patent

active

057359512

ABSTRACT:
A single crystal pulling apparatus which eliminates trouble caused by an isolation valve heated to a high temperature uses a heat insulation plate provided below the isolation valve. The heat insulation plate is operated synchronously with the opening or closing of the isolation valve. The heat insulation plate prevents hot gases from coming from the lower chamber from coming into direct contact with the isolation valve. The prevention of overheating of the isolation valve provides for smooth operation and growth of a good quality single crystal.

REFERENCES:
patent: 4350560 (1982-09-01), Helgeland et al.
patent: 5254319 (1993-10-01), Oda et al.
patent: 5330729 (1994-07-01), Oda et al.

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