Single crystal orientation identifying and determining apparatus

Details Single crystal orientation identifying and determining apparatus Single crystal orientation identifying and determining apparatus

1990-01-17

1991-02-19

Hannaher, Constantine

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 73, 414225, 414433, G01N 2320, B65H 100, B65G 2900

Patent

active

049950630

ABSTRACT:
A single crystal orientation identifying and determining apparatus for semiconductor wafers capable of conducting the facial discrimination of a semiconductor wafer and the determination of the crystal orientation thereof, which comprises a first wafer store; an alignment device for aligning the wafer in a predetermined orientation; an X-ray inspection device for inspecting the wafer as to whether or not the inspected face of the wafer is a predetermined particular face, and whether or not the orientation of the principal plane of the wafer is within a predetermined range, said X-ray detector, and X-ray detector, and an X-ray inspection stage; a second wafer store; a first conveyor for conveying the wafer from the first wafer store to the alignment device; a second conveyor for conveying the wafer form the alignment device to the X-ray inspection device, and a third conveyor for conveying the wafer from the X-ray inspection device to an arbitrary address in the second wafer store determined based on the result of the X-ray inspection and the wafer's address in the first wafer store.

REFERENCES:
patent: 4662811 (1987-05-01), Hayden
patent: 4695215 (1987-09-01), Jacoby et al.
patent: 4710259 (1987-12-01), Howe et al.
patent: 4819167 (1989-04-01), Cheng et al.
patent: 4846626 (1989-07-01), Engelbrecht
patent: 4892455 (1990-01-01), Hine
patent: 4911597 (1990-03-01), Maydan et al.
patent: 4938654 (1990-07-01), Schram

Affiliated with

Also associated with

Rating

Single crystal orientation identifying and determining apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Single crystal orientation identifying and determining apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Single crystal orientation identifying and determining apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1150299