Single crystal ferroelectric barium titanate films

Details Single crystal ferroelectric barium titanate films Single crystal ferroelectric barium titanate films

1993-06-09

1994-09-27

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of coating supply or source outside of primary...

427576, 427561, 4272553, 2041922, B05D 306, C23C 1600, C23C 1400

Patent

active

053506065

ABSTRACT:
A ferroelectric thin film consisting of a single crystal of BaTiO.sub.3 which has a perovskite structure is produced by a method comprising evaporating Ba and Ti in an atomic ratio of 1:1 from discrete evaporation sources of Ba and Ti to deposit them on a substrate in a vacuum deposition vessel while supplying a small amount of an oxygen gas to the reactor.

REFERENCES:
patent: 2992079 (1961-07-01), Linares, Jr. et al.
patent: 3409412 (1968-11-01), Sasaki
patent: 3872359 (1975-03-01), Feuersanger
patent: 4724038 (1988-02-01), Pastor et al.
patent: 5006363 (1991-04-01), Fujii et al.
patent: 5009762 (1991-04-01), Maeno et al.
patent: 5077270 (1991-12-01), Takeda et al.
patent: 5145713 (1992-09-01), Venkatesan et al.
Japanese abstract of 60-96599 May 30, 1985
Japanese abstract of 60-90893 May 22, 1985

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