Single chip thermal tester

Details Single chip thermal tester Single chip thermal tester

1986-06-19

1987-09-29

Yasich, Daniel M.

Thermal measuring and testing

Thermal testing of a nonthermal quantity

324158R, G01N 2500, G01R 3126

Patent

active

046965785

ABSTRACT:
A thermal tester for measuring the efficiency of a heat transfer device for cooling semiconductor chips is disclosed having a positioning means operable to position the heat transfer device in thermal contact with the chip. The positioning means is adjustable in at least 5 degrees of freedom. Temperature sensors are provided to sense the temperature of the chip, the chip support substrate and the positioning means adjacent the heat transfer device. Means is provided to dispose the chip and heat transfer device in a vacuum. Control means is also provided to adjust the temperature of the chip unitl it is the same as the substrate to thereby assure heat transfer occurs only from the chip to the positioning means by way of the heat transfer device. When this thermal balance is achieved the thermal resistance of the heat transfer device can be calculated.

REFERENCES:
patent: 3720103 (1973-03-01), Adams et al.
patent: 3745360 (1973-07-01), Belzer et al.
patent: 3842346 (1974-10-01), Bobbitt
patent: 3906363 (1975-09-01), Fowler
patent: 4123938 (1978-11-01), Hamilton
patent: 4396300 (1983-08-01), Characklis et al.
patent: 4522512 (1985-06-01), Atkins
patent: 4604572 (1986-08-01), Horiuchi

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