Sin-containing coatings for electronic devices

Details Sin-containing coatings for electronic devices Sin-containing coatings for electronic devices

1986-12-03

1989-05-02

Pianalto, Bernard D.

Stock material or miscellaneous articles

Composite

Of silicon containing

427 38, 427 531, 4274071, 427387, B32B 904

Patent

active

048267333

ABSTRACT:
A method of forming at low temperatures silicon- and nitrogen-containing ceramic or ceramic-like coatings for the protection of electronic devices. The coatings are produced by the ceramification at temperatures of, or below, 400 degrees Centigrade of preceramic silicon nitrogen-containing polymer coatings deposited from a solvent solution. The coatings are useful for planarizing the surfaces of electronic devices and for passivation.

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Glaser & Pantano, Effect of the H.sub.2 O/Teos Ration Upon the Preparation & Nitridation of Silica Sol/Gel Films, 1984, Journal of Non-Crystalline Solids, 63, 209-221.

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