Simultaneous double sides polishing method

Coating processes – Magnetic base or coating – Magnetic coating

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Details

427128, 427132, 427209, 427240, 427328, 4274432, 427444, H01F 1002

Patent

active

053646550

ABSTRACT:
A thin plate such as a magnetic disk substrate is rotatably placed in a hole of a carrier provided between upper and lower surface plates forming a dynamic pressure producing surface in a temperature-controlled polishing liquid. When the number of revolutions of the surface plates increases, the dynamic pressure effect of the polishing agent is produced between the surface-plate surface and the substrate surface so that the substrate is polished in the non-contact state with the surface plate. The substrate surface is polished by fine free abrasive grains in the polishing liquid flowing between the surface plate and the substrate to provide a high plane degree to which surface precision of the surface plate is transferred. The present invention makes employs a float polishing, and is particularly suit to surface polishing of a thin plate such as a magnetic disk substrate which resets a residual processed strain. A magnetic disk having an excellent surface state can be realized.

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