Simultaneous determination of film uniformity and thickness

Details Simultaneous determination of film uniformity and thickness Simultaneous determination of film uniformity and thickness

1975-10-30

1976-11-30

McGraw, Vincent P.

Optics: measuring and testing

For optical fiber or waveguide inspection

250339, 250341, 356 51, 356161, 356199, G01N 2100, G01B 1100

Patent

active

039945863

ABSTRACT:
A method and apparatus are disclosed for simultaneously determining thickness and uniformity of a supported film which is at least partially translucent by directing a beam of radiation at the film at an angle thereto, reflecting a portion of the radiation from the interface of the film and substrate back through the film, splitting a portion of the reflected radiation into a first beam portion which is monitored to determine uniformity of film thickness, and a second beam portion which is chopped and split again into a reference beam and a thickness determining beam which are filtered and transduced so that the resulting signals can be compared to determine film thickness.

REFERENCES:
patent: 3017512 (1962-01-01), Wolbert
patent: 3325649 (1967-06-01), Bird
patent: 3737237 (1973-06-01), Zurasky
patent: 3825755 (1974-07-01), Ruskin

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