Simultaneous deflections in charged-particle beams

Details Simultaneous deflections in charged-particle beams Simultaneous deflections in charged-particle beams

1994-12-15

1997-07-22

Anderson, Bruce

Radiant energy

With charged particle beam deflection or focussing

With target means

250396R, H01J 37145

Patent

active

056506287

ABSTRACT:
A charged particle beam is controlled by two pairs of deflectors that adjust the beam through two or more deflection centers, thereby saving cost and space and reducing system noise. The mathematics of the superposition of signals and, therefore, of the deflecting fields provide orthogonality of the adjustments so that all adjustments are independent of each other.

REFERENCES:
patent: 3801784 (1974-04-01), Wittry
patent: 4870286 (1989-09-01), Tobuse
patent: 4881015 (1989-11-01), Shimoma et al.
patent: 5051556 (1991-09-01), Sakamoto et al.
patent: 5177412 (1993-01-01), Morohashi et al.
patent: 5285074 (1994-02-01), Haire et al.

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