Simulator of optical intensity distribution, computer...

Details Simulator of optical intensity distribution, computer... Simulator of optical intensity distribution, computer...

2006-03-27

2008-12-09

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Lamp beam direction or pattern

C356S124000, C355S053000, C355S073000

Reexamination Certificate

active

07463347

ABSTRACT:
A simulator of an optical intensity distribution includes a field divider dividing an exposure field on a substrate into a first and second fields, the first field being to be directly exposed to a light incident at the maximum incident angle, the second field being prevented from being directly exposed to the light by a protrusion on the substrate, a first optical intensity calculator calculating an optical intensity of the first field by using a direct incident light component of the light, a second optical intensity calculator calculating an optical intensity of the second field by using a reflected light component of the light reflected from a sidewall of the protrusion, and a projected image simulation engine simulating an optical intensity distribution of a projected image of a mask pattern on the substrate, based on the optical intensities of the first field and the second field.

REFERENCES:
patent: 5644390 (1997-07-01), Yasuzato
patent: 5876883 (1999-03-01), Leroux
patent: 6137901 (2000-10-01), Harazaki
patent: 6982786 (2006-01-01), Shiode
patent: 7002665 (2006-02-01), Sato et al.
patent: 2004/0227921 (2004-11-01), Sato et al.
patent: 9-43828 (1997-02-01), None

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