Data processing: structural design – modeling – simulation – and em – Modeling by mathematical expression
Reexamination Certificate
2007-03-16
2008-12-16
Phan, Thai (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Modeling by mathematical expression
C703S006000, C716S030000, C430S005000
Reexamination Certificate
active
07467072
ABSTRACT:
A complex two-dimensional layout of a photomask or other three-dimensional object is systematically decomposed into a finite number of elementary two-dimensional objects with the ability to cause one-dimensional changes in light transmission properties. An algorithmic implementation of this can take the form of creation of a look-up table that stores all the scattering information of all two-dimensional objects needed for the synthesis of the electromagnetic scattered field from the original three-dimensional object. The domain is decomposed into edges, where pre-calculated electromagnetic field from the diffraction of isolated edges is recycled in the synthesis of the near diffracted field from arbitrary two-dimensional diffracting geometries. The invention has particular applicability in die-to-database inspection where an actual image of a mask is compared with a synthesized image that takes imaging artifacts of corners, edges and proximity into account. Another application is optical proximity correction which consists of evaluating the image of every feature on a mask and improving it by introducing edge shifts and iteratively adjusting the amounts of these shifts.
REFERENCES:
patent: 5447810 (1995-09-01), Chen et al.
patent: 6738859 (2004-05-01), Liebchen
patent: 2003/0064298 (2003-04-01), Broeke et al.
Kulas Charles J.
Phan Thai
Trelis IP Law Group, PC
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