Simulation method with respect to trace object that event occurs

Details Simulation method with respect to trace object that event occurs Simulation method with respect to trace object that event occurs

1997-03-04

1999-07-20

Teska, Kevin J.

Boots, shoes, and leggings

20419212, 36446826, 36446902, 36447424, 427489, 428216, G06F 944

Patent

active

059264020

ABSTRACT:
A simulation method for performing a simulation with respect to a trace object that an event occurs depending on a probability in a domain to be analyzed. The simulation method includes the step of dividing a flowing field into cells serving as domains to be analyzed, the step of arranging molecules serving as the target object in the cells, the step of performing the simulation such that the molecules are moved in the cells and the number of stickings or a sticking amount occurring on a wall surface or a film portion as the result of the movement larger than the number of times of the event or a change amount led by the probability, and the step of outputting, as a simulation result, a film profile obtained as the result of the simulation.

REFERENCES:
patent: 5282140 (1994-01-01), Tazaw et al.
patent: 5751607 (1998-05-01), Ohta
Kersch, et al., Modeling of a Sputter Reactor Using the Direct Simulation Mante Carlo Method, IEEE Conf Proceedings, pp. 7.6.1-7.6.4, Apr. 1992.
Stippel et al., Proess Simulation for the 1990's, Microelectronics Journal, vol. 26, pp. 203-215, 1995.
S. Tatsuta, et al., "Simulation of CVD Step Coverage for SiH.sub.4 Using Parellel Processing of DSMC Method", Proceedings of International Conference on Computational Engineering Science, vol. 1, (1995) pp. 592-597.

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