Simulation method and simulator

Details Simulation method and simulator Simulation method and simulator

1996-09-06

1998-10-06

Teska, Kevin J.

Pulse or digital communications

Repeaters

Testing

364496, 364498, 364578, 364573, G06F 1716

Patent

active

058190732

ABSTRACT:
A simulation method and a simulator determine a profile of particles, by determining whether or not each reaction formula, which describes a reaction of particles to generate reactants in semiconductor solids or gases, is in equilibrium, determining unknown variables excluding variables related to the reactants of each equilibrium reaction, forming continuity equations containing a plurality of time differential terms as functions of the unknown variables, linearizing and discretizing the time differential terms into the coefficient matrix and constant vector of simultaneous linear equations, and solving the simultaneous linear equations.

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patent: 5265040 (1993-11-01), Saji et al.
patent: 5408638 (1995-04-01), Sagawa et al.
patent: 5438526 (1995-08-01), Itoh et al.
patent: 5590051 (1996-12-01), Yokozawa
patent: 5625579 (1997-04-01), Hinsberg, III et al.
patent: 5640331 (1997-06-01), Dahm et al.
Simulation of Boron Diffusion in High Concentration using a Part Diffusion Model, Nakamura et al, Sep. 1995, p. 7.

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