Simplified wafer alignment

Details Simplified wafer alignment Simplified wafer alignment

2004-04-23

2008-11-18

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C414S744600, C414S935000

Reexamination Certificate

active

07453160

ABSTRACT:
The present invention is directed to aligning wafers within semiconductor fabrication tools. More particularly, one or more aspects of the present invention pertain to quickly and efficiently finding an alignment marking, such as an alignment notch, on a wafer to allow the wafer to be appropriately oriented within an alignment tool. Unlike conventional systems, the notch is located without firmly holding and spinning or rotating the wafer. Exposure to considerable backside contaminants is thereby mitigated and the complexity and/or cost associated with aligning the wafer is thereby reduced.

REFERENCES:
patent: 5608223 (1997-03-01), Hirokawa et al.
patent: 6126380 (2000-10-01), Hillman
patent: 6222196 (2001-04-01), Mack
patent: 6428399 (2002-08-01), Tanabe et al.
patent: 6537836 (2003-03-01), Summerer
patent: 6555832 (2003-04-01), Ryding et al.
patent: 6577382 (2003-06-01), Kida et al.
patent: 6633046 (2003-10-01), Mitchell et al.
patent: 6727980 (2004-04-01), Ota et al.
patent: 6778275 (2004-08-01), Bowes
patent: 6888260 (2005-05-01), Carpi et al.
patent: 6944517 (2005-09-01), Krupyshev
patent: 7348275 (2008-03-01), Sekiya
patent: 2001/0029082 (2001-10-01), Fujiwara
patent: 2002/0009900 (2002-01-01), Tay et al.
patent: 2002/0113218 (2002-08-01), Okumura et al.
patent: 2003/0010280 (2003-01-01), Sugihara et al.
patent: 2003/0124820 (2003-07-01), Johnsgard et al.
patent: 2005/0181575 (2005-08-01), Summerer
patent: 2005/0251279 (2005-11-01), Ray

Affiliated with

Also associated with

Rating

Simplified wafer alignment does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Simplified wafer alignment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Simplified wafer alignment will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4022853