Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2005-06-07
2005-06-07
Eckert, George (Department: 2815)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C438S057000, C438S073000
Reexamination Certificate
active
06902946
ABSTRACT:
An active pixel sensor having a transparent conductor that directly contacts a conductive element in an interconnection structure to electrically connect the transparent conductor to a pixel sensor bias voltage is provided. The active pixel sensor includes a semiconductor substrate, the interconnection layer, which is formed over the substrate, and a pixel interconnection layer formed over the interconnection layer. Photo sensors that include a pixel electrode, an I-layer, and may include a P-layer are formed over the pixel interconnection layer. The transparent conductor is formed over the photo sensors and the conductive element exposed on the surface of the interconnection layer.
REFERENCES:
patent: 6018187 (2000-01-01), Theil et al.
patent: 6051867 (2000-04-01), Theil et al.
patent: 6114739 (2000-09-01), Theil et al.
Agilent Technologie,s Inc.
Eckert George
Landau Matthew C.
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