Simplified method of making active matrix liquid crystal display

Details Simplified method of making active matrix liquid crystal display Simplified method of making active matrix liquid crystal display

1993-04-05

1994-09-13

Thomas, Tom

Fishing, trapping, and vermin destroying

437181, 148DIG1, H01L 3118

Patent

active

053468333

ABSTRACT:
An inverted staggered (bottom gate) thin film transistor (TFT) for active matrix liquid crystal display is processed with three masks. The first mask is used to pattern a metal film on a glass substrate as the gate of the TFT, the scan line of the TFT array, and a portion of the data line of the TFT array. The second mask is used to form a TFT mesa with a gate dielectric layer, an a-Si layer as channel, and a heavily-doped n+s-Si layer for contacting the source and the drain of the TFT. A third mask is used to pattern the transparent conductive indium-tin oxide film as the pixel electrode, the source/drain electrodes of the TFT, and the interconnections of the data line.

REFERENCES:
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patent: 5032536 (1991-07-01), Oritsuki et al.
patent: 5148248 (1992-09-01), Possin
Lebosq et al., "An Improved Design of Active Matrix LCD Requiring only Two Photolithographic Steps" 1985 Int. Display Research Conf. pp. 34-36.

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