Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1976-05-27
1977-07-05
Mack, John H.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204298, C23C 1500
Patent
active
040338436
ABSTRACT:
The method of the present invention comprises depositing by sputtering, from a single target or source, a thin high quality single crystal film in a predictable and repeatable manner having the general formula Pb.sub.1.sub.-x Sn.sub.x Te, where x may range from 0.00 to 0.30. The film has infrared sensing properties with a cutoff wavelength .lambda..sub.c from about 6.mu.m to greater than 25.mu.m. Structurally high quality film can be deposited on a large number of single crystal substrates of, for example CaF.sub.2 (100 or 111) or BaF.sub.2 (111), PbTe and PbSnTe, in a low pressure atmosphere by supported discharge sputtering or ion beam sputtering at substrate temperatures between about 220.degree. and 350.degree. C and at film growth rates from 0.1 to 3.0.mu.m/hr. In the case of supported discharge sputtering the voltage to the target and/or the ion (plasma) current is varied to control the rate of film deposition. In the case of ion beam sputtering, the ion beam energy and/or ion beam current is varied to control the rate of film deposition.
REFERENCES:
K. J. Linden et al., "High-Performance 8-14.mu.mm Pb.sub.1.sub.-x Sn.sub.x Te Photodiodes", Proc. IEEE, vol. 63, pp. 27-31, Jan. 1975.
C. Corsi et al., "Infrared Detector Arrays by R F Sputtering", Infrared Physics, vol. 12, pp. 271-275, 1972.
E. Krikorian, "Thin Film Electrooptical Devices", J. Vac. Sci. Tech., vol. 12, No. 1, Jan./Feb. 1975, pp. 186-187.
C. Corsi, "Pb.sub.x Sn.sub.1.sub.-x Te Layers by R F Multicathode Sputtering", J. Appl. Phys., vol. 45, Aug. 1974, pp. 3467-3471.
C. Corsi et al., "Pb.sub.x Sn.sub.1.sub.-x Te Epitaxial Layers by RF Multicathode Sputtering", Appl. Phys. Lett., vol. 24, May 1974, pp. 484-485.
C. Corsi et al., "Thin Film Infrared Detector Arrays for Integrated Electronic Structures", Infrared Physics, vol. 16, pp. 37-45, 1976.
Krikorian Esther
Sneed Richard J.
Bissell Henry M.
General Dynamics Corporation
Johnson Edward B.
Mack John H.
Weisstuch Aaron
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