Silylated poly(vinyl)phenol polymers

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...

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526279, C08F 800

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active

047911719

ABSTRACT:
Novel partially silylated polyvinylphenol polymers of the Formula (I) are disclosed: ##STR1## wherein X is H or CH.sub.3 ; R is --OH or ##STR2## wherein R.sub.1 is --O or --O(CH.sub.2).sub.n, n is 1 to 4, and R.sub.2, R.sub.3 and R.sub.4 are independently selected from 1-4 carbon alkyl, aryl or benzyl, and wherein the average molecular weight of the silylated polymer is from about 2,700 to 22,000 and the average percent by weight silicon is from about 3% to 12%. This invention also relates to blends of such polymers to yield a polymer having a predetermined average molecular weight and percent by weight silicon.

REFERENCES:
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Biguez, F., et al., at the Micro Circuits Engineering Conference in Berlin, 1984, Presented on behalf of Commisseriat a l'Energie Atomique, France.
Hofer, D., et al. SPIE/Advances in Resist Technology, 469 (1984), 16.
Parasczak, J., Plasma Processing of Polymers, IBM, T. J. Watson Research Center, Yorktown Heights, Presented at 16th Northeast Regional Meeting, ACS, 6/86.
Excerpts Nos. 68-71 from Program and Abstracts of 16th Northeast Regional Meeting, ACS, 6/86.
Shaw, J. M., et al., Polymer Eng. Sci., 23 (18), 1054, Dec., 1983.
Kawazu, R., et al., J. Vac. Sci. Technol., B4(1) (Jan./Feb.,1986), 409.

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