Siloxane resins

Details Siloxane resins Siloxane resins

2005-03-29

2005-03-29

Peng, Kuo-Liang (Department: 1712)

Stock material or miscellaneous articles

Composite

Of silicon containing

C528S039000, C528S012000, C556S457000, C556S482000, C427S387000

Reexamination Certificate

active

06872456

ABSTRACT:
This invention pertains to a siloxane resin composition comprising R1SiO3/2siloxane units, R2SiO3/2siloxane units and (R3O)bSiO(4-b)/2siloxane units wherein R1is an alkyl group having 1 to 5 carbons, hydrogen, or mixtures thereof; R2is a monovalent organic group having 6 to 30 carbons; R3is a branched alkyl group having 3 to 30 carbons, b is from 1 to 3; and the siloxane resin contains from 2.5 to 85 mole percent R1SiO3/2units, 2.5 to 50 mole percent R2SiO3/2units and 5 to 95 mole percent (R3O)bSiO(4-b)/2units. The siloxane resin is useful to make insoluble porous resin and insoluble porous coatings. Heating a substrate coated with the siloxane resin at a sufficient temperature effects removal of the R2and R3O groups to form an insoluble insoluble porous coating having a porosity of 1 to 60 volume percent and a dielectric constant in the range of 1.5 to 3.0.

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Journal of Materials Chemistry; “Preparation of low density poly (methylsilsesquioxane)s for LSI interlayer dielectrics with low dielectric constant. Fabrication of Angstrom size pores prepared by baking trifluoropropylsilyl copolymers”, Satoshi Mikoshiba and Shuzi Hayase, 1999, 9, 591-598.

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