Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – At least one aryl ring which is part of a fused or bridged...
Patent
1996-04-26
1999-10-05
Glass, Margaret W.
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
At least one aryl ring which is part of a fused or bridged...
528 10, 528 31, 528 21, 524443, 524789, 427493, 427510, 427515, 427387, 430326, 430322, 430920, 522 63, 522172, C08K 334
Patent
active
059625813
ABSTRACT:
A method of forming a pattern comprising the steps of forming a film of an organosilane compound comprising a polysilane having a repeating unit represented by the following general formula (1) on a substrate, irradiating an actinic radiation onto a predetermined portion of the film of the organosilane compound formed on the substrate, and removing the predetermined portion of the film irradiated by the actinic radiation by dissolving it with an aqueous alkaline developing solution. ##STR1## wherein Ar is a substituted or non-substituted aryl group.
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Fujioka Sawako
Hayase Shuzi
Ito Mao
Kani Rikako
Mikoshiba Satoshi
Glass Margaret W.
Kabushiki Kaisha Toshiba
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