Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate
2006-05-30
2006-05-30
Zimmer, Marc S. (Department: 1712)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
C528S025000, C528S031000, C528S032000, C257SE21026, C257SE21492
Reexamination Certificate
active
07053030
ABSTRACT:
A silicone hyper-branched polymer surfactant is included in a rinsing solution which may be used to remove photoresist residues. The silicone hyper-branched polymer surfactant is prepared by polymerizing a monomer represented by the following chemical formula (1), where R1denotes a vinyl group and R2denotes hydrogen, and includes both a hydrophobic group and a hydrophilic group
REFERENCES:
patent: 6010954 (2000-01-01), Ho et al.
patent: 6307081 (2001-10-01), Takiuchi et al.
patent: 2001/0038123 (2001-11-01), Yu
New Hyperbranched Poly(siloxsilanes): Variation of the Branching Pattern and End-Functionalization authored by Frechet et al. and published in Macromolecules, 1998, 31, 3461-68
Kim Boo-Deuk
Kim Jae-Ho
Kim Kyoung-Mi
Kim Young-Ho
Lee Shi-Yong
Volentine Francos & Whitt PLLC
Zimmer Marc S.
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