Silicon wafer testing rig and a method for testing a silicon waf

Details Silicon wafer testing rig and a method for testing a silicon waf Silicon wafer testing rig and a method for testing a silicon waf

1998-05-29

2000-08-08

Karlsen, Ernest

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324761, 324758, 324765, 702 95, 702117, 702 82, 73849, 73853, G01B 728, G01R 1512, G01R 3102

Patent

active

061007099

ABSTRACT:
A wafer testing rig includes a stand, a first contact component, a second contact component and a biasing device. The first contact component is mounted to the stand. The second contact component is mounted to the stand for movement towards and away from the first contact component. The first and second contact components are shaped so that a wafer, when located between the contact components, is deflected into a dome shape when the second contact component is moved towards the first contact component. The biasing device is operable to move the second contact component towards and away from the first contact component. An electrical tester is provided to test the wafer.

REFERENCES:
patent: 4700077 (1987-10-01), Dykstra et al.
patent: 4750141 (1988-06-01), Judell et al.
patent: 5489854 (1996-02-01), Buck et al.
patent: 5530374 (1996-06-01), Yamaguchi
patent: 5642056 (1997-06-01), Nakajima et al.

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