Silicon wafer processing boat carrier slot plunge cutter

Details Silicon wafer processing boat carrier slot plunge cutter Silicon wafer processing boat carrier slot plunge cutter

1987-01-08

1988-04-19

Weidenfeld, Gil

Gear cutting, milling, or planing

Milling

Including means to infeed rotary cutter toward work

834713, 83488, 83875, 409193, 409201, B23C 328, B23D 4702

Patent

active

047385731

ABSTRACT:
A silicon wafer diffusion processing quartz boat carrier slot plunge cutter machine is provided that has a vertical rapid traverse power feed variable speed spindle with automatic stop switches controlling down feed and return with spindle speeds generally in the range of 3,000 RPM to 4,500 RPM for effective quartz slot cutting. Work piece table longitudinal and cross travel are manually driven with longitudinal travel for work piece to cutting tool alignment and cross travel being for indexing of specific slotting configurations. A fixed table support is adapted to mounting of various jig types for slotting as desired.

REFERENCES:
patent: 2464297 (1949-03-01), Ertl
patent: 3388414 (1968-06-01), Hilty et al.
patent: 4036093 (1977-07-01), Thorsell
patent: 4574670 (1986-03-01), Johnson

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