Silicon valve

Details Silicon valve Silicon valve

1985-02-21

1987-03-03

Rosenthal, Arnold

Valves and valve actuation

Reciprocating valve

Diaphragm

25112906, 251368, 2391022, F16K 714, B05B 102

Patent

active

046470131

ABSTRACT:
A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice.

REFERENCES:
patent: 3424063 (1969-01-01), Norwood
patent: 3477693 (1969-11-01), Bezanin
patent: 3918495 (1975-11-01), Abrahams
patent: 3921916 (1975-11-01), Bassous
patent: 4013229 (1977-03-01), Rohs
patent: 4157935 (1979-06-01), Solyst
patent: 4317559 (1982-03-01), Finkbeiner et al.
patent: 4455192 (1984-06-01), Tamai
Article entitled "Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon" by E. Bassous, IEEE Transactions of Electron Devices, vol. ED-25, No. 10 (Oct. 1978), pp. 1178-1185.

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