Silicon valve

Details Silicon valve Silicon valve

1986-11-13

1988-07-12

Rosenthal, Arnold

Valves and valve actuation

Reciprocating valve

Diaphragm

25112906, 251368, 2391022, 239494, F16K 714, F16K 3102, B05B 102

Patent

active

047565080

ABSTRACT:
A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice.

REFERENCES:
patent: 1216630 (1917-02-01), Tuthill
patent: 3921916 (1975-11-01), Bassous
patent: 4013229 (1977-03-01), Rohs
patent: 4581624 (1986-04-01), O'Connor

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