Silicon tetrafluoride byproduct separation process

Chemistry of inorganic compounds – Treating mixture to obtain metal containing compound – Group iiia metal or beryllium

Reexamination Certificate

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Details

C423S122000, C423S179000, C423S184000, C423S551000, C423S625000, C422S187000, C023S30200R, C023S30500F

Reexamination Certificate

active

07897125

ABSTRACT:
Embodiments of the invention provide a system and process for recovering useful compounds from a byproduct composition produced in a silicon tetrafluoride production process.

REFERENCES:
patent: 7090809 (2006-08-01), Harel et al.

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