Silicon target support assembly for an image sensing device

Electric lamp and discharge devices – Cathode ray tube – Image pickup tube

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313383, H01J 3126, H01J 3138

Patent

active

045217130

ABSTRACT:
An image sensing device includes a wafer of semiconductor material having a first surface and a second surface. The first surface has a central portion comprising a membrane, which is surrounded by a rim. The membrane is of lesser thickness than the rim. An improved support assembly for the device comprises a lower support member in contact with the rim portion of the second surface of the wafer near the periphery thereof, and an upper tensioning member having a target contact portion which forcibly abuts the rim portion of the first surface of the wafer adjacent to the membrane and urges the wafer against the lower support member thereby tensioning the membrane. Centering brackets center and secure the lower support member and the upper tensioning member within the device.

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