Silicon tactile imaging array and method of making same

Details Silicon tactile imaging array and method of making same Silicon tactile imaging array and method of making same

1988-12-09

1991-10-08

Yusko, Donald J.

Communications: electrical

Continuously variable indicating

With particular transmitter

341 27, 341 33, 341 34, 901 33, 310338, 361283, 361290, 7386204, G08C 1910, H03K 1794

Patent

active

050558382

ABSTRACT:
A high-performance single-crystal silicon tactile imaging array organized in a X-Y matrix of capacitor elements. Metallic column lines are formed on a glass support substrate, while the row lines are formed from a contiguous chain of doubly-supported bridge structures, with one such structure for each sensing element. All of the bridge structures are simultaneously fabricated from a single-crystal silicon semiconductor wafer using a two-step boron diffusion process, followed by a silicon-to-glass electrostatic bonding step and subsequent unmasked wafer dissolution. Each bridge structure has a thick center plate for the sense capacitor supported by thinner beams connected to adjacent row single-crystal silicon support rails bonded to the glass substrate. The force sensitivity and maximum operating range of the tactile imager can be selected over a very wide range by appropriately setting the dimensions of these thinner support beams. The resulting imager is rugged, of high resolution and high density, and is inherently stable over time and temperature.

REFERENCES:
patent: 4555953 (1985-12-01), Dario et al.
patent: 4555954 (1985-12-01), Kim
patent: 4746812 (1988-05-01), Amazeen et al.
Hackwood, et al., "A Torque Sensitive Tactile Array for Robotics", International Journal of Robotics Research, vol. 2, No. 2, Summer, 1983, pp. 46-50.
K. Petersen et al., "A Force Sensing Chip Designed for Robotic and Manufacturing Automation Applications", 1985 IEEE, pp. 30-32.
K. J. Chun & K. D. Wise, "High Performance Silicon Tactile Imager Basedon on a Capacitive Cell", IEEE Transactions on Electron Devices, vol. ED-32, No. 7, Jul., 1985, pp. 1196-1201.
K. J. Chun & K. D. Wise, "A capacitive Silicon Tactile Imaging Array", Proceedings of the International Conference on Solid State Sensors and Actuators Transducers, 85, Boston, Mass., Jun. 11-14, 1985, pp. 22-25.
S. Sugiyama, et al., "High Resolution Silicon Pressure Imager with CMOS Processing Circuits", IEEE Transducers' 87, pp. 444-447.
Henry Allen, et al., "A Subminiature Load Cell Configurable for Multiplexed Tactile Arrays", Transducers' 87, pp. 448-450.
Paul Regtien, "Integrated Tactile Imaging Sensor", Transducers' 87, pp. 451-455.
R. A. Boie, "Capacitive Impedance Readout Tactile Image Sensor", IEEE (1984), pp. 370-378.
R. White & A. King, "Tactile Array for Robotics Employing a Rubbery Skin in a Solid State Optical Sensor", IEEE Transducers' 85, pp. 18-21.
K. Wong & J. Van der Spiegel, "A Shielded Piezoresistive Tactile Sensor Array", Transducers' 85, pp. 26-29.
M. Railbert, "All Digital VLSI Tactile Array Sensor", IEEE, 1984, pp. 314-319.
M. Railbert, J. Tanner, "Design and Implementation of VLSI Tactile Sensing Computer", International Journal of Robotics Research, vol. 1, No. 3, Fall, 1982.
W. D. Hillus, "A High Resolution Imaging Touch Sensor", International Journal of Robotics Research, vol. 1, No. 2, Summer, 1982, pp. 33-44.

Affiliated with

Also associated with

Rating

Silicon tactile imaging array and method of making same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Silicon tactile imaging array and method of making same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Silicon tactile imaging array and method of making same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-259699