Silicon spatial light modulator

Details Silicon spatial light modulator Silicon spatial light modulator

1990-06-29

1992-10-20

Hille, Rolf

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359248, 359259, 357 30, 357 58, G02F 101, H01L 2912

Patent

active

051575388

ABSTRACT:
A crystalline silicon 1.1-20 micron spatial light modulator has an X-Y array of p-i-n pixels which are selectively foward biased at low voltages to induce substantial phase shifts in the optical wavefront, by the dual injection of holes and electrons through the silicon body and parallel to the light being modulated. The easy-to-fabricate SLM, is less sensitive to changes in temperature and wavelength, and can modulate light regardless of its state of polarization.

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"Electroluminescent Diodes and Array", J. C. Marinace et al. IBM Technical Disclosure Bulletin, vol. 8 No. 11, Apr. 1966.

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