Silicon slice carrier block and plug assembly

Details Silicon slice carrier block and plug assembly Silicon slice carrier block and plug assembly

1976-08-17

1978-04-04

Whitehead, Harold D.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

51216R, B24B 404

Patent

active

040819280

ABSTRACT:
A carrier block and plug assembly for use in polishing semiconductor slices and includes a block of stainless steel onto which is secured a Delrin retainer with Delrin plugs seated on the block and within the retainer. A Mylar spacer of variable predetermined thickness is positioned between the block and retainer and around the plugs. The bottom side of the block as well as the top sides of the plug and retainer are machined to be parallel to each other. The thickness of the spacer determines the amount of the slice protruding above the retainer, thickness being based upon the thickness of the slice being polished.
The slice is placed over a plug after water or other appropriate liquid has been placed on the plug or slice to provide adhesion of the slice to the plug by surface tension, whereby the slice can freely rotate on the plug and within the retainer during polishing. Polishing takes place by mounting the block on a rotating device which rotates over and against a standard polishing pad, both block and pad rotates in the same direction. The pad is flat and parallel to the retainer surface. The slices are removed from the block after polishing by immersion in water to diminish the surface tension.

REFERENCES:
patent: 3103770 (1963-09-01), Carter
patent: 3559346 (1971-02-01), Paola
patent: 3731435 (1973-05-01), Boettcher
patent: 3842544 (1974-10-01), Paola

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