Silicon single crystal pull-up apparatus

Details Silicon single crystal pull-up apparatus Silicon single crystal pull-up apparatus

1990-01-16

1992-03-24

Kunemund, Robert

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

1566181, 1566191, 1566204, 156DIG64, C30B 1502, C30B 1530

Patent

active

050986759

ABSTRACT:
A silicon single crystal pull-up apparatus includes a crucible for containing a molten silicon material, an annular heater disposed so as to surround the crucible for heating the silicon material in the crucible, and a plurality of plate-like members made of heat insulation material and disposed so as to surround the heater, each of the plate-like members has an arc-shaped cross section not less than a two-third circle and is connected with each other at respective side edges thereof such that the plurality of the plate-like members are assembled into a shape of a cylinder having wave-like circumferential side walls.

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K. U. Ravi, "The Growth of EFG Silicon Ribbons", Journal of Crystal Growth, vol. 39, pp. 1-16 (1977).

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