Silicon sensor with trimmable wheatstone bridge

Details Silicon sensor with trimmable wheatstone bridge Silicon sensor with trimmable wheatstone bridge

1989-01-24

1990-08-07

Ruehl, Charles A.

Measuring and testing

Dynamometers

Responsive to force

73727, 73765, G01L 122, G01L 906

Patent

active

049457624

ABSTRACT:
A device and method for trimming diffused or implanted resistors incorporated within a silicon sensor. Current pulses are applied to cause the migration of aluminum contacts in silicon, resulting in controllable incremental reductions in resistor value. The resistors are symmetrically positioned within a Wheatstone bridge to correct offset voltage and sensitvity erros that result from manufacturing tolerances.

REFERENCES:
patent: 4606781 (1986-08-01), Vyne
patent: 4622856 (1986-11-01), Binder et al.
patent: 4672853 (1987-06-01), Hickox
patent: 4713680 (1987-12-01), Davis et al.
patent: 4725791 (1988-02-01), Susak et al.

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