Silicon semiconductor wafer test

Details Silicon semiconductor wafer test Silicon semiconductor wafer test

1995-01-10

1996-10-29

Bueker, Richard

Coating apparatus

Program, cyclic, or time control

118712, 118715, 118719, 436178, 901 48, C23C 1600

Patent

active

055693288

ABSTRACT:
The invention relates to a system for manufacturing semiconductor devices from silicon semiconductor wafers, comprising forming device operable forming a silicon semiconductor wafer, oxidizing device operable for forming an oxidation gate on the silicon semiconductor wafer and thereafter, a testing arrangement for testing the silicon semiconductor wafer for contaminants using a test drop; wherein the improvement comprises, rotating device operable for receiving the wafer and for rotating in one direction and the opposite direction at predetermined rates in response to first electrical signals; carrier device operable for being positioned on the silicon semiconductor wafer and for retaining at least a portion of the test drop in contact with the wafer during relative movements of the carrier device over the surface of the wafer while substantially eliminating direct contact between the carrier device and the wafer; radial moving device operable for moving the carrier device along a predetermined radial path relative any clockwise and counterclockwise rotation of the wafer in response to second electrical signals; first control device operable for generating the first electrical signals for causing the rotating device to rotate first in one direction and then in the opposite direction so that the resultant effect is an incremental rotation of the wafer; and second control device operable for generating second electrical signals for causing the radial moving device to move the carrier device incrementally radially so that the carrier device follows a path covering substantially all of a predetermined portion of the surface of the wafer.

REFERENCES:
patent: 3995756 (1976-12-01), Hjelm
patent: 4297908 (1981-11-01), Zimmer
patent: 4990459 (1991-02-01), Maeda
patent: 5055413 (1991-10-01), Kageyama

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