Silicon semiconductor wafer for analyzing micronic biological sa

Details Silicon semiconductor wafer for analyzing micronic biological sa Silicon semiconductor wafer for analyzing micronic biological sa

1988-06-16

1990-03-13

Niebling, John F.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

356344, 356318, 2504612, B01D 1508

Patent

active

049081128

ABSTRACT:
An analytical separation device in which a capillary sized conduit is formed by a channel in a semiconductor device and the channel is closed by a glass plate. Electrodes are positioned in the channel and to activate the motion of liquids through the conduit by electroosmosis.

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