Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1991-06-03
1993-01-12
Ng, Jin F.
Measuring and testing
Fluid pressure gauge
Diaphragm
73708, 73721, 338 4, G01L 906
Patent
active
051780160
ABSTRACT:
A silicon pressure sensor chip has a shear element on a sculptured diaphragm. The shear element is a piezo-resistive four-terminal resistor which is oriented so as to respond to the in-plane shear stress component in the diaphragm. The shear element is located on a thick shelf which is a portion of the sculptured diaphragm, which also has a thinner portion. This diaphragm configuration increases the bending moment at the location of the sensing element through the load of the thin portion of the diaphragm, which is suspended along the periphery of the thick shelf.
REFERENCES:
patent: 3213681 (1965-10-01), Pearson
patent: 3341794 (1967-09-01), Stedman
patent: 4065970 (1978-01-01), Wilner
patent: 4116075 (1978-09-01), Ort
patent: 4236137 (1980-11-01), Kurtz et al.
patent: 4317126 (1982-02-01), Gragg, Jr.
patent: 4528855 (1985-07-01), Singh
patent: 4667516 (1987-05-01), Schulz
patent: 4672853 (1987-06-01), Hickox
patent: 4771639 (1988-09-01), Saigusa et al.
patent: 4813272 (1989-03-01), Miyazaki et al.
patent: 4911016 (1990-03-01), Miyazaki et al.
patent: 4972716 (1990-11-01), Tobita et al.
Dauenhauer Dennis A.
Reimann Hans
Ng Jin F.
Sensym, Incorporated
Swarthout Brent A.
LandOfFree
Silicon pressure sensor chip with a shear element on a sculpture does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Silicon pressure sensor chip with a shear element on a sculpture, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Silicon pressure sensor chip with a shear element on a sculpture will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1212652