Silicon platform for optical modules

Details Silicon platform for optical modules Silicon platform for optical modules

2005-04-19

2005-04-19

Kianni, K. Cyrus (Department: 2883)

Optical waveguides

Integrated optical circuit

C385S002000, C385S008000, C385S013000

Reexamination Certificate

active

06882761

ABSTRACT:
A small-sized and low-cost silicon platform for optical modules which enables high-speed transmission. A conductor pattern is formed on an oxide layer formed on the surface of a silicon substrate through a dielectric film. A hole extending from the surface of the dielectric film to the oxide layer is formed in the dielectric film at a position for the formation of a bonding pad. A conductor material is directly formed on the oxide layer exposed to the bottom of this hole. This conductor material constitutes a bonding pad portion electrically connected to the conductor pattern.

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