Silicon particles, silicon particle superlattice and method...

Details Silicon particles, silicon particle superlattice and method... Silicon particles, silicon particle superlattice and method...

2005-02-18

2010-12-14

Le, H. (Holly) T (Department: 1787)

Chemistry of inorganic compounds

Silicon or compound thereof

C423S337000, C423S348000, C423S349000

Reexamination Certificate

active

07850938

ABSTRACT:
A production method, comprising a step of synthesizing silicon particle-containing silicon oxide particles by performing a gas phase reaction of monosilane gas and oxidizing gas for oxidizing the monosilane gas and a step of removing the silicon oxide with hydrofluoric acid after holding the silicon oxide particle powder in an inert atmosphere at 800-1400°, provides high-purity silicon nanoparticles which are highly practical as material powder for high-performance light-emitting elements and electronic parts in an industrial scale.

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