Silicon oxide on a substrate

Details Silicon oxide on a substrate Silicon oxide on a substrate

1997-09-26

1999-09-14

Pianalto, Bernard

Stock material or miscellaneous articles

Composite

Of silicon containing

4272553, 427579, 427580, 428336, 428337, 428412, 428446, 428469, 4284735, 428522, 428523, 428688, B32B 906

Patent

active

059521082

ABSTRACT:
A product substrate coated with a uniform deposit of silicon oxide created by subjecting the substrate to an electrical discharge with a dielectric barrier in the presence of a controlled atmosphere containing a silane and an oxidizing gas, the atmosphere being at a pressure higher than 10,000 Pa, and wherein the atmosphere is maintained in the immediate vicinity of an electrode in the region where the electrical discharge is produced and further wherein any entrainment of oxygen other than that forming part of the atmosphere in the region is prevented.

REFERENCES:
patent: 5462779 (1995-10-01), Misiano et al.
patent: 5670224 (1997-09-01), Izu et al.

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