Silicon oxide lapping coatings

Details Silicon oxide lapping coatings Silicon oxide lapping coatings

1982-07-27

1985-04-30

Derrington, James

Abrasive tool making process, material, or composition

Impregnating or coating an abrasive tool

51209DL, 51298, 51308, 427 39, 427 40, B24B 100

Patent

active

045141924

ABSTRACT:
Enhanced micromachining rates are observed when lapping discs with standard SiO.sub.x lapping coatings are doped with trivalent or pentavalent additives, such as boron or phosphorous. Doping can be accomplished by subjecting the SiO.sub.x material to a "post glow", i.e., an argon plasma in the presence of a source of the dopant.

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