Silicon nitride vacuum furnace process

Details Silicon nitride vacuum furnace process Silicon nitride vacuum furnace process

1990-02-14

1990-11-13

Straub, Gary P.

Chemistry of inorganic compounds

Silicon or compound thereof

Binary compound

C01B 21068

Patent

active

049700570

ABSTRACT:
An improved process of preparing silicon nitride by the direct nitridation of silicon metal is disclosed. The process is a multi-step one which is substantially more efficient than prior processes and produces a silicon nitride having an oxygen content of less than 1%, a silicon metal content of less than 0.5%, and an alpha phase content of at least 85%, preferably at least 90%. The silicon nitride may be converted to a powder.

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