Electricity: conductors and insulators – Insulators
Reexamination Certificate
2011-03-29
2011-03-29
Pert, Evan (Department: 2826)
Electricity: conductors and insulators
Insulators
C264S647000, C361S688000
Reexamination Certificate
active
07915533
ABSTRACT:
In the silicon nitride substrate concerning an embodiment of the invention, degree of in-plane orientation fa of β type silicon nitride is 0.4-0.8. Here, degree of in-plane orientation fa can be determined by the rate of the diffracted X-ray intensity in each lattice plane orientation in β type silicon nitride. As a result of research by the inventors, it turned out that both high fracture toughness and high thermal conductivity are acquired, when degree of in-plane orientation fa was 0.4-0.8. Along the thickness direction, both the fracture toughness of 6.0 MPa·m1/2or higher and the thermal conductivity of 90 W/m·K or higher can be attained.
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Imamura Hisayuki
Kaga Youichirou
Kikuchi Hiromi
Watanabe Jun-ichi
Akerman Senterfitt LLP
Hitachi Metals Ltd.
Klein Jordan
Neils, Esq. Paul F.
Pert Evan
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