Silicon nitride sintered body and process for producing the same

Details Silicon nitride sintered body and process for producing the same Silicon nitride sintered body and process for producing the same

1993-09-08

1994-11-29

Bell, Mark L.

Compositions: ceramic

Ceramic compositions

Refractory

501 98, 264 65, 264 66, C04B 3558

Patent

active

053690656

ABSTRACT:
A silicon sintered body comprising a matrix phase consisting of silicon nitride and a grain boundary phase in which the silicon nitride consists of 66 to 99% by volume of .beta.-Si.sub.3 N.sub.4 and/or .beta.'-sialon with the balance being .alpha.-Si.sub.3 N.sub.4 and/or .alpha.'-sialon, the .beta.-Si.sub.3 N.sub.4 and/or .beta.'-sialon consisting of hexagonal rod-like grains having a diameter of 500 nm or less in the minor axis and an aspect ratio 5 to 25, the .alpha.-Si.sub.3 N.sub.4 and/or .alpha.'-sialon consisting of equi-axed grains having an average diameter of 300 nm or less, and titanium compounds are contained within the grains of the matrix phase and in the grain boundary phase. The sintered body is produced by mixing (1) 100 parts by weight of .alpha.-Si.sub.3 N.sub.4 powder, (2) 0.1 to 10 parts by weight of titanium oxide having an average particle size of 100 nm or less and (3) 2 to 15 parts by weight, in total, of specified sintering aids; molding the resultant powder mixture into a green compact; subjecting the green compact to primary sintering and secondary sintering under the prescribed conditions.

REFERENCES:
patent: 5045513 (1991-09-01), Mizuno et al.
patent: 5173458 (1992-12-01), Nishioka et al.
patent: 5214009 (1993-05-01), Komatsu et al.

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