Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent
1986-06-04
1988-10-25
Kittle, John
Stock material or miscellaneous articles
Composite
Of quartz or glass
350641, 350642, 4273977, 4274197, 428433, 428434, 428448, 428450, 428469, 428472, 4284721, 428698, 4289122, B32B 1706
Patent
active
047803720
ABSTRACT:
A protective diffusion barrier for metalized mirror structures is provided by a layer or coating of silicon nitride which is a very dense, transparent, dielectric material that is impervious to water, alkali, and other impurities and corrosive substances that typically attack the metal layers of mirrors and cause degradation of the mirrors' reflectivity. The silicon nitride layer can be deposited on the substrate before metal deposition to stabilize the metal/substrate interface, and it can be deposited over the metal to encapsulate it and protect the metal from corrosion or other degradation. Mirrors coated with silicon nitride according to this invention can also be used as front surface mirrors.
REFERENCES:
patent: 4097889 (1978-06-01), Kem et al.
patent: 4273828 (1981-06-01), Tracy et al.
patent: 4517217 (1985-05-01), Hoffman
Kern & Rosler, Advances in Deposition Process for Passivation Films, J. of Vac. Sci & Techno. vol. 14, No. 5, pp. 1082-1099, 1977.
Milek, Silicon Nitride for Microelectronic Applications, Handbook of Electronic Materials, vol. 3, IFI/Plenum, NY, NY, pp. 10-13 (1971); SERI/TR-31-042.
SERI Materials Branch Semiannual Report, Jan. 1, 1978-Jun. 30, 1978, Solar Energy Research Institute, Golden, Colorado, (1978).
SERI/RR-31-145, Solar Glass Mirror Program A Planning Report on Near-Term Mirror Development Activities, Solar Energy Research Institute, Golden, Colorado (1979), Vossen and Kern, Thin Film Processes, Academic Press NY, NY (1978).
Benson David K.
Tracy C. Edwin
Albrecht John M.
Hightower Judson R.
Kittle John
Richardson Kenneth
Schwartz P. R.
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