Silicon nitride ceramic heater

Stock material or miscellaneous articles – Composite – Of inorganic material

Patent

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Details

428688, 428698, 219541, 219552, 219553, B32B 1504, H05B 110

Patent

active

059980494

ABSTRACT:
A silicon nitride ceramic heater comprising a base body of silicon nitride ceramics, and a heating element embedded in the body, the ceramic heater being characterized in that the element further comprises, as a main ingredient, at least one of carbides, nitrides or silicides selected from the metal group consisting of W, Mo, Re, Cr, Ti, Ta, Ni and Co, and not more than 75 vol % of the BN content in combination with the main ingredient. This composition can reduce the difference in thermal expansion coefficients between the heating element and the silicon nitride ceramics and can thus prevent the heating element from being cracked by thermal stress. Consequently, the silicon nitride ceramic heater is superior in durability and can maintain high performance for a long time.

REFERENCES:
patent: 4357526 (1982-11-01), Yamamoto
patent: 4403015 (1983-09-01), Nakai
patent: 4613455 (1986-09-01), Suzuki
patent: 4652727 (1987-03-01), Hoshizaki
patent: 4690872 (1987-09-01), Kato
patent: 4804823 (1989-02-01), Okuda
patent: 4912305 (1990-03-01), Tatemasu
patent: 5233166 (1993-08-01), Maeda

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