Silicon microphone with enhanced impact proof structure...

Electrical audio signal processing systems and devices – Electro-acoustic audio transducer – Microphone capsule only

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C381S191000, C381S369000, C367S181000, C438S053000

Reexamination Certificate

active

08045733

ABSTRACT:
A backplateless silicon microphone and a wire protection method for improved impact resistance are disclosed. A circular diaphragm is surrounded by a circular spring having a plurality of slots and perforations to facilitate air damping reduction, release of in-plane stress, and improve out-plane flexibility. Anchored at a substrate, the circular spring holds the silicon microphone suspended over a backside hole in the substrate but allows the diaphragm to vibrate perpendicular to the substrate. A microphone variable capacitor is formed between the perforated spring and substrate. Slot size is minimized to prevent particles from entering an underlying air gap. A plurality of “n” bonding pads near the outer edge of the circular spring are connected by “n/2” bonding wires that serve as a stopper to restrict an upward motion of the diaphragm. The bonding wires may cross each other to enable lower loop height for more effective resistance to impact.

REFERENCES:
patent: 4182937 (1980-01-01), Greenwood
patent: 5452268 (1995-09-01), Bernstein
patent: 7346178 (2008-03-01), Zhe et al.
patent: 7804969 (2010-09-01), Wang et al.
patent: 7829366 (2010-11-01), Miller et al.
patent: 2002/0067663 (2002-06-01), Loeppert et al.
patent: 2004/0184633 (2004-09-01), Kay et al.
patent: 2006/0093170 (2006-05-01), Zhe et al.
patent: 2008/0123878 (2008-05-01), Zhe et al.
patent: 2009/0208037 (2009-08-01), Zhe
patent: PCT/SG 2008/000369 (2008-12-01), None
Co-pending U.S. Appl. No. 11/500,114, filed Aug. 7, 2006 , “Silicon Microphone With Impact Proof Structure”, Assigned to the Same Assignee As the Present Invention.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Silicon microphone with enhanced impact proof structure... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Silicon microphone with enhanced impact proof structure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Silicon microphone with enhanced impact proof structure... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4275770

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.