Silicon micromachined CO.sub.2 cleaning nozzle and method

Abrading – Abrading process – Utilizing fluent abradant

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451102, 451 75, 134 7, B24C 100, B24C 504

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active

055450733

ABSTRACT:
An apparatus and method for cleaning a workpiece with abrasive CO.sub.2 snow operates with a nozzle for creating and expelling the snow. The nozzle includes an upstream section for receiving CO.sub.2 in a gaseous form, and having a first contour shaped for subsonic flow of the CO.sub.2. The nozzle also includes a downstream section for directing the flow of the CO.sub.2 and the snow toward the workpiece, with the downstream section having a second contour shaped for supersonic flow of the CO.sub.2. The nozzle includes a throat section, interposed between the upstream and downstream sections, for changing the CO.sub.2 from the gaseous phase along a constant entropy line to a gas and snow mixture within the downstream section at a speed of at least Mach 1.0. In this manner, additional kinetic energy is imparted to the snow by delaying the conversion into the solid phase until the gaseous CO.sub.2 reaches supersonic speeds.

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"Elements of Gas Dynamics" by Liepmann and Roshko Chapter 5, pp. 124-125. 1957.

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