Electrolysis: processes – compositions used therein – and methods – Electrolytic material treatment – Solid
Patent
1998-11-19
2000-06-20
Phasge, Arun S.
Electrolysis: processes, compositions used therein, and methods
Electrolytic material treatment
Solid
205687, 250396R, 250397, 219600, 373166, H01J 3726
Patent
active
060774177
ABSTRACT:
A method and system for cleaning the silicon microlenses in an electron-beam microcolumn in situ. The microlenses individually are heated by passing a current through each microlens. The current is utilized to heat the microlens to at least two hundred degrees Centigrade to prevent contamination and occasionally to a temperature on the order of six to seven hundred degrees Centigrade to remove any builtup or potential contamination.
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Chang T. H. Philip
Kim Ho-Seob
Lee Kim Y.
Etec Systems, Inc.
Phasge Arun S,.
Winburn John T.
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