Silicon micro sensor and manufacturing method therefor

Details Silicon micro sensor and manufacturing method therefor Silicon micro sensor and manufacturing method therefor

1992-11-20

1994-05-10

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaged product

Structurally defined

430315, 430316, 430317, 73717, 73726, 73727, 428133, 427 74, G03C 300

Patent

active

053106105

ABSTRACT:
A silicon micro sensor including a silicon substrate, a support element formed over an etched portion of the silicon substrate and a sensor element formed on the support element wherein the support element has a double layered structure including a silicon oxide film formed on the silicon substrate using the thermal oxidization method and an aluminum oxide film formed on the silicon oxide film using the sputtering method.

REFERENCES:
patent: 4218298 (1980-08-01), Shimada et al.
patent: 4668374 (1986-07-01), Bhagat et al.
patent: 4670092 (1987-06-01), Motamedi
patent: 4774843 (1988-10-01), Ghiselin et al.
patent: 4791465 (1988-12-01), Sakai et al.
patent: 4793194 (1988-12-01), Wilner
patent: 4926143 (1990-05-01), Harada et al.
patent: 4967589 (1990-11-01), Yagawara et al.
patent: 5003812 (1991-04-01), Yagawara et al.
European Patent Office Search Report.
J. Manaka et al, Low Power Micro Gas Detector, Ricoh Tech. Report No. 14, Nov., 1985, pp. 44 to 48 (English translation).
Bunji Hisamori, Thermopile, Sensor Gijutsu (Sensor technique), Jul., 1986, pp. 66 to 68 (English Translation).

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